| 发明名称 |
Additives to silane for thin film silicon photovoltaic devices |
| 摘要 |
Chemical additives are used to increase the rate of deposition for the amorphous silicon film (alphaSi:H) and/or the microcrystalline silicon film (muCSi:H). The electrical current is improved to generate solar grade films as photoconductive films used in the manufacturing of Thin Film based Photovoltaic (TFPV) devices.
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| 申请公布号 |
US8535760(B2) |
申请公布日期 |
2013.09.17 |
| 申请号 |
US20100872806 |
申请日期 |
2010.08.31 |
| 申请人 |
HURLEY PATRICK TIMOTHY;RIDGEWAY ROBERT GORDON;HUTCHISON KATHERINE ANNE;LANGAN JOHN GILES;AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
HURLEY PATRICK TIMOTHY;RIDGEWAY ROBERT GORDON;HUTCHISON KATHERINE ANNE;LANGAN JOHN GILES |
| 分类号 |
C23C16/24 |
主分类号 |
C23C16/24 |
| 代理机构 |
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