| 摘要 |
PURPOSE: A power supply device for a pulse laser with a variable pulse width is provided to maintain a stable output even if the pulse width of a laser is increased. CONSTITUTION: A power supply device includes a charging part(20), a plurality of capacitor banks(10), a discharging part(30), a serial to parallel conversion part(40), and a controller. The charging part charges the capacitor banks. The discharging part discharges the charged power of the capacitor banks and applies the discharged power to a pulse laser oscillator. The serial to parallel conversion part connects all or a part of the capacitor banks in series or in parallel depending on the pulse width of a laser outputted from the pulse laser oscillator. The controller controls the charging part and the serial to parallel conversion part and includes an IGBT(Insulated Gate Bipolar Transistor) which is turned on or off by the controller. |
