| 摘要 |
PROBLEM TO BE SOLVED: To facilitate securing of airtightness throughout an entire gas circulation system, and to enhance airtightness of an entire circulation system by preventing leakage of gas through a heat exchanger and a blower.SOLUTION: A gas circulating precision air conditioner capable of supplying a specific gas G air-conditioned by an air conditioning part 2 from a supply part 2s to a prescribed air conditioning space S that is hermetically sealed, and air-conditioning the gas G returned from the air conditioning space S to a return part 2r by the air conditioning part 2, is configured to include: a duct part 3 for communicating and connecting the supply part 2s with the return part 2r and forming a flow passage Rg having airtightness in which the gas G flows; and a specific gas supply means 4 capable of supplying the gas G from a specific gas supply source 4s to the inside of the duct part 3. At least an entire heat exchanger 5 in contact with the gas G in the air conditioning part 2 and an entire blower 6 for circulating the gas G are stored in the duct part 3. |
