| 摘要 |
PROBLEM TO BE SOLVED: To provide a carry-in/carry-out device for a workpiece capable of smoothly replacing a workpiece after processing with a workpiece before processing.SOLUTION: There is provided a carry-in/carry-out device 7 for a workpiece that is operable to carry a workpiece in and out to a holding table 3 holding the workpiece, the carry-in/carry-out device 7 including an operation member 73 provided with a rotary shaft in the center in parallel with a holding surface of the holding table 3, first and second workpiece holding means 74a, 74b arranged at first and second mounting parts apart from each other by 180° on the rotary shaft respectively, rotary driving means, and moving means of moving the operation member 73 in a direction perpendicular to the holding surface of the holding table 3. The first and second workpiece holding means 74a, 74b comprise first and second support shafts supported by the first and second mounting parts of the operation member 73 rotatably in parallel with the rotary shaft, and first and second workpiece holders mounted on other ends of the first and second support shafts in a suspended state respectively. |
