| 摘要 |
PROBLEM TO BE SOLVED: To provide a line spectrometric measurement apparatus capable of performing highly accurate measurement in a wide dynamic range.SOLUTION: A line spectrometric measurement apparatus 1 comprises: a stage 10; a light source 20; an incident light restriction part 30; a spectrometer 40; a detector 50; a controller 60; adjustment means 70; and a dimmer filter 80. The spectrometer 40 disperses light of each position along an X direction in a beam cross-section of input light (light having passed through an opening of a slit 31) in a Y direction. The detector 50 receives the light which is outputted from the spectrometer 40 and has passed through the dimmer filter 80, and detects a spectrum of the light of each position along the X direction. The dimmer filter 80 includes wavelength dependence of transmittance in the spectrometer 40 and a transmittance distribution in the Y direction for compensating wavelength dependence of sensitivity in the detector 50. |
