发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME |
摘要 |
<p>A first first-conductivity-type impurity region (4) is provided at an upper part of a semiconductor layer (102) positioned at the periphery of a trench (12). A gate electrode (8) is provided, with a gate insulating film (11) therebetween, on the side wall surfaces of the trench (12) and on the semiconductor layer (102) positioned at the periphery of the trench (12). Between the gate electrode (8) positioned at the periphery of the trench (12), and the first first-conductivity-type impurity region (4), a second-conductivity-type impurity region (50) and a second first-conductivity-type impurity region (51) are sequentially provided from the side of the first first-conductivity-type impurity region (4).</p> |
申请公布号 |
WO2013118203(A1) |
申请公布日期 |
2013.08.15 |
申请号 |
WO2012JP05716 |
申请日期 |
2012.09.10 |
申请人 |
PANASONIC CORPORATION;KUDOU, CHIAKI;KIYOSAWA, TSUTOMU |
发明人 |
KUDOU, CHIAKI;KIYOSAWA, TSUTOMU |
分类号 |
H01L29/78;H01L21/336;H01L29/12 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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