| 摘要 |
A device of measuring a thickness of an organic thin film is provided to check uniformity of the thickness of the organic thin film deposited on the entire surface of a substrate by using a plurality of optical systems. A device of measuring a thickness of an organic thin film includes a light source(32), an optical distributer(35), first and second dispersion lenses, an optical detector(37), and a signal process unit(39). The light source emits light. The optical distributor divides the light emitted from the light source into first and second light and projects the first light to a substrate(31) on which organic matter is deposited. The first dispersion lens disperses the first light reflected by the substrate. The second dispersion lens disperses the second light supplied from the optical distributor. The optical detector detects intensity of light dispersed by the first and second dispersion lenses. The signal process unit processes a signal to monitor the intensity of the light detected from the optical detector. |
