MICROWAVE EMITTING DEVICE AND SURFACE WAVE PLASMA PROCESSING APPARATUS,申请号KR20130010277-传众专利搜索

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发明名称	MICROWAVE EMITTING DEVICE AND SURFACE WAVE PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR20130088797(A)	申请公布日期	2013.08.08
申请号	KR20130010277	申请日期	2013.01.30
申请人	TOKYO ELECTRON LIMITED	发明人	IKEDA TARO;OSADA YUKI
分类号	H05H1/30	主分类号	H05H1/30
代理机构		代理人
主权项
地址

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