| 摘要 |
A foreign substance inspection apparatus includes: an irradiation unit configured to irradiate a surface of an object to be inspected with inspection light; a detector configured to detect light scattered by the surface irradiated with the inspection light; a determination unit configured to determine, using data of a surface roughness of the object, and data of a size of the foreign substance, an irradiated region of the inspection light on the surface, that allows light scattered by the foreign substance to be discriminated from light scattered by the object due to the surface roughness of the object; and a controller configured to control the irradiation unit so as to irradiate the irradiated region determined by the determination unit with the inspection light.
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