| 摘要 |
<p>PURPOSE: A transfer system is provided to transfer a substrate while preventing an effect of a substrate temperature on a substrate of a room temperature. CONSTITUTION: A robot (10) includes a robot hand (11) which comprises an upper hand (11a) and a lower hand (11b). A control unit (50) comprises a control unit (51) and a storage unit (52). The control unit comprises a process data acquisition unit (51a), a determination unit (51b), and an instruction unit (51c). The determination unit determines a robot hand which maintains a substrate based on the temperature combination of the substrate. The determination unit generates the combination by dividing a substrate temperature into a room temperature and a non-room temperature. [Reference numerals] (10) Robot; (11a) Upper hand; (11b) Lower hand; (50) Control unit; (51) Control unit; (51a) Process data acquisition unit; (51b) Determination unit; (51c) Instruction unit; (52) Memory unit; (52a) Combination information; (60) Host apparatus</p> |
