| 摘要 |
PURPOSE: A chip fixing device and a pickup system including the same are provided to maximize the efficiency of air pressure supplied from an air pressure driver by minimizing the variation of the air pressure applied to an air pressure path. CONSTITUTION: Absorption blocks (210,230) include a plurality of absorption grooves, an air pressure path, and a connection space. One or more air pressure drivers (250) apply air pressure to the connection space. An air pressure distribution member (600) is formed in the connection space. The air pressure distribution member is displaced by the air pressure applied by the air pressure driver. An ejecting pin (130) is formed on the air pressure path. |
