| 摘要 |
PROBLEM TO BE SOLVED: To provide apparatus and method for manufacturing an organic EL device which can enhance efficiency when a donor substrate is reused.SOLUTION: An apparatus for manufacturing an organic EL device includes: a transfer layer forming chamber 25 for forming a transfer layer on a donor substrate SG; a transfer chamber 22 for transferring a part of the transfer layer from the donor substrate SG to an element substrate; a lamination chamber 21 that is connected to the transfer chamber 22 and loads the element substrate into the transfer chamber 22; a separation chamber 23 that is connected to the transfer chamber 22 and unloads the element substrate from the transfer chamber 22; and a dry cleaning chamber 27 for removing the remainder in the transfer chamber from the donor substrate SG. The lamination chamber 21, transfer chamber 22, and separation chamber 23 are connected to each other in a row in the order named. The transfer layer forming chamber 25, transfer chamber 22, and dry cleaning chamber 27 are connected to each other in an annular shape in the order named. The apparatus for manufacturing the organic EL device further includes a transport section for repetitively transporting the donor substrate SG with respect to the transfer layer forming chamber 25, transfer chamber 22, and dry cleaning chamber 27 in the order named. |
