摘要 |
PROBLEM TO BE SOLVED: To decrease the number of processes, and preventing fracture generation by ample decarbonization.SOLUTION: A manufacturing method for a target which is used for a thin film of a rare earth oxide superconductor includes a mixing process of mixing a raw material powder comprising a rare earth oxide, metal oxide and barium carbonate, a calcination process of calcinating its mixed powder, and a process of crashing, forming and firing the calcinated raw material. This rare earth oxide superconductor is expressed by the general formula REBaCuO, wherein RE includes one or two or more kinds of elements selected from rare earth elements. In the calcination process, the mixed powder is mounted on a ceramic plate to form a thin layer 1 cm or less thickness and its temperature is raised from room temperature to 900°C or higher in 1 to 5 hours. |