| 摘要 |
PROBLEM TO BE SOLVED: To provide an article storage facility which prevents substrates in a conveying container housed in a storage part from being damaged even if it becomes impossible to appropriately supply an inert gas to the storage part.SOLUTION: There is provided a supply condition detecting means S that detects the supply conditions of the inert gas to a plurality of storage parts 10S. A control means manages the plurality of storage parts 10S based on the detection information of the supply condition detecting means by classifying them into approved storage parts to which the inert gas is appropriately supplied and unapproved storage parts to which the inert gas is not appropriately supplied and further executes retreat conveyance treatment such that the conveying containers switched from approved storage parts to unapproved storage parts owing to changes in supply conditions of the inert gas and housed in the storage parts 10S are conveyed to the approved storage parts. |
