Spectroscopy data are correlated to physical locations on a sample. A laser beam is scanned along a beam trajectory relative to the sample located in a sample chamber. The laser beam disassociates material from the sample along the beam trajectory to produce an aerosol of the disassociated material within the sample chamber. A fluid is passed through the sample chamber to transport the disassociated material to a spectrometer for determining spectroscopy data values of a selected element along the beam trajectory. The spectroscopy data values are correlated with respective locations of the sample along the beam trajectory, and an image is displayed of at least a portion of the sample including the respective locations along the beam trajectory where the material was disassociated by the laser beam. The image includes indicia of the spectroscopy data values at their correlated locations.
申请公布号
WO2013101745(A1)
申请公布日期
2013.07.04
申请号
WO2012US71311
申请日期
2012.12.21
申请人
ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人
CLEM, WILLIAM E.;WILKINS, JAY N.;SUMMERFIELD, LEIF