发明名称 SUBSTRATE TRANSFER DEVICE AND SHAPE DISCRIMINATION METHOD USING CONTACT TYPE DISPLACEMENT SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a transfer device having a function capable of discriminating the orientation flat of a glass substrate without stopping the glass substrate, the glass substrate being used in a manufacturing line for a color filter substrate and TFT substrate used for a flat panel display.SOLUTION: A transfer device used in a manufacturing line for a substrate used for a flat panel display includes at least a substrate transfer mechanism and a shape discrimination mechanism of substrate vertices. The shape discrimination mechanism is a sensor provided at least along two sides of the substrate in a direction orthogonal to the flow direction of the manufacturing line.
申请公布号 JP2013131523(A) 申请公布日期 2013.07.04
申请号 JP20110278128 申请日期 2011.12.20
申请人 TOPPAN PRINTING CO LTD 发明人 SEKIGUCHI SHINJI
分类号 H01L21/677;H01L21/68 主分类号 H01L21/677
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