发明名称 DRAWING APPARATUS AND PATTERN CORRECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a drawing apparatus capable of preventing contact of the edge of a nozzle and the surface of a substrate.SOLUTION: The drawing device arranges the edge 1a of an inkjet nozzle 1 at a waiting position upward of the surface of the substrate 4 in waiting, and arranges the edge 1a of the nozzle 1 at a drawing position upward of the drawing start point to discharge a liquid material 2 after once stopping the edge 1a of the nozzle 1 at a correction position upward of a drawing start point in drawing. Thus, the contact of the edge 1a of the nozzle 1 and the surface of the substrate 4 can be prevented by setting a correction distance H between the correction position and the drawing position small.
申请公布号 JP2013128907(A) 申请公布日期 2013.07.04
申请号 JP20110281796 申请日期 2011.12.22
申请人 NTN CORP 发明人 KOIKE TAKASHI
分类号 B05C11/10;B05C5/00;H05K3/10;H05K3/22 主分类号 B05C11/10
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