MICRO ELECTRO MECHANICAL SYSTEMS DEVICE AND APPARATUS FOR COMPENSATING TREMBLE

摘要

PURPOSE: An MEMS(Micro Electro Mechanical Systems) device and an image stabilizer are provided to fix a driven unit by using an elastic unit and a dynamic stopper, thereby obtaining improved durability and reliability. CONSTITUTION: An MEMS device comprises a substrate(100), a driven unit(500), an elastic part(600), a driving unit(200), and a dynamic stopper(300). The driven unit is relatively moved with respect to the substrate. The elastic unit is connected to the driven unit and the substrate. The elastic unit is fixed to the substrate and drives the driven unit. The dynamic stopper is fixed to the substrate and hangs on the driven unit.