| 摘要 |
<P>PROBLEM TO BE SOLVED: To apply desired grinding to a plate-like workpiece by not only causing a grinding feed speed of a grinding feed means to be variable but also controlling another element. <P>SOLUTION: A grinding method for a plate-like workpiece rotates a chuck table 11 holding a plate-like workpiece W on a holding surface 11b and performing grinding feeding in a vertical direction relative to the holding surface 11b of the chuck table 11 while rotating a grinding wheel 5. When performing grinding machining by bringing a grinding surface of the grinding wheel 5 into contact with the plate-like workpiece W held on the holding surface 11b of the chuck table 11, grinding efficiency and the state of a machining surface of the plate-like workpiece W are improved by controlling the rotation speed of the grinding wheel 5 or the rotation speed of the chuck table 11 on the basis of a load current value of electric power supplied to an electric power motor 7 rotating and driving the grinding wheel 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
