发明名称 Ellipsometers and polarimeters comprising polarization state compensating beam directing sample wobble compensating system, and method of use
摘要 An improved system and method for investigation of a wobbling surface of a sample with an electromagnetic beam, involving application of a beam directing dual reflection surface "prism" system, which, while effecting beam locus direction rotation of 90 degrees also preserves beam polarization state. The system allows causing an electromagnetic beam to access an otherwise difficult to access sample in, for instance, a vacuum deposition chamber, and enables achieving very closely spaced incident and spherical mirror reflected points of beam reflection from a sample surface in use.
申请公布号 US8467057(B1) 申请公布日期 2013.06.18
申请号 US201113200413 申请日期 2011.09.23
申请人 JOHS BLAINE D.;HE PING;J.A. WOOLLAM CO., INC. 发明人 JOHS BLAINE D.;HE PING
分类号 G01J4/00 主分类号 G01J4/00
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