发明名称 AUTO SHUTTER
摘要 PURPOSE: An auto shutter is provided to prevent the generation of precipitate in advance by cleaning a liquid chemical remaining on a roller. CONSTITUTION: A rotating shaft(154) is formed in the longitudinal direction of a base plat(150) and rotates the base plate and a shutter layer(152). The roller is separately rotated from the rotary shaft. A driving water block is combined with the base plate to cover the roller exposed to the hole of the base plat. The driving water block includes a water bath holding the driving water contacting with a part of the roller. A driving water supply pipe(130) supplies driving water to the driving water block.
申请公布号 KR20130063641(A) 申请公布日期 2013.06.17
申请号 KR20110130106 申请日期 2011.12.07
申请人 K.C.TECH CO., LTD. 发明人 LEE, JU SUNG
分类号 G02F1/13;H01L21/302 主分类号 G02F1/13
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