发明名称 SINGLE CRYSTAL GROWTH APPARATUS AND METHOD
摘要 PURPOSE: An apparatus and a method for growing a single crystal are provided to prevent the generation of crystal defects due to oversupply of carbon, by controlling the amount of the carbon supplied to a crucible in a heating process for single crystal growth temperature. CONSTITUTION: A crucible(110) accommodates a raw material. A guide ring(120) is inserted into the upper part of the crucible. A crucible cover(130) opens and closes the opened upper of the crucible. An insulating material(140) and a quartz tube(150) surround the outer surface of the crucible. A heating unit(160) is formed outside the quartz tube and heats the crucible. A coating layer(170) is formed in the inner surface of the crucible.
申请公布号 KR20130063184(A) 申请公布日期 2013.06.14
申请号 KR20110129568 申请日期 2011.12.06
申请人 DONG-EUI UNIVERSITY INDUSTRY-ACADEMIC COOPERATIONFOUNDATION 发明人 LEE, WON JAE;YANG, TAE KYOUNG
分类号 C30B23/02;C30B29/36;H01L21/20 主分类号 C30B23/02
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