发明名称 |
SINGLE CRYSTAL GROWTH APPARATUS AND METHOD |
摘要 |
PURPOSE: An apparatus and a method for growing a single crystal are provided to prevent the generation of crystal defects due to oversupply of carbon, by controlling the amount of the carbon supplied to a crucible in a heating process for single crystal growth temperature. CONSTITUTION: A crucible(110) accommodates a raw material. A guide ring(120) is inserted into the upper part of the crucible. A crucible cover(130) opens and closes the opened upper of the crucible. An insulating material(140) and a quartz tube(150) surround the outer surface of the crucible. A heating unit(160) is formed outside the quartz tube and heats the crucible. A coating layer(170) is formed in the inner surface of the crucible.
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申请公布号 |
KR20130063184(A) |
申请公布日期 |
2013.06.14 |
申请号 |
KR20110129568 |
申请日期 |
2011.12.06 |
申请人 |
DONG-EUI UNIVERSITY INDUSTRY-ACADEMIC COOPERATIONFOUNDATION |
发明人 |
LEE, WON JAE;YANG, TAE KYOUNG |
分类号 |
C30B23/02;C30B29/36;H01L21/20 |
主分类号 |
C30B23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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