| 发明名称 |
MAGNETIC DEVICES AND METHODS OF MANUFACTURING THE SAME |
| 摘要 |
Magnetic devices, and methods of manufacturing the same, include a stack structure including at least one magnetic layer, etched using an etching gas including at least 70 volume percent of a hydrogen-containing gas and at least 2 volume percent of CO gas. |
| 申请公布号 |
US2013149499(A1) |
申请公布日期 |
2013.06.13 |
| 申请号 |
US201213589708 |
申请日期 |
2012.08.20 |
| 申请人 |
LEE HAK-SUN;KEN TOKASHIKI;KIM MYEONG-CHEOL;KWON HYUNG-JOON;LEE SANG-MIN;LEE WOO-CHEOL;JUNG MYUNG-HOON |
发明人 |
LEE HAK-SUN;KEN TOKASHIKI;KIM MYEONG-CHEOL;KWON HYUNG-JOON;LEE SANG-MIN;LEE WOO-CHEOL;JUNG MYUNG-HOON |
| 分类号 |
G11C11/02;B32B3/30 |
主分类号 |
G11C11/02 |
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