| 摘要 |
To provide a lighting device for inspection and lighting method for inspection with which it is possible for differences such as differences in brightness to appear between defects and normal parts by means of inspection light, this lighting device is provided with: a planar light source (1) that radiates inspection light; a lens (2) that is on an optical axis (LX) of the inspection light radiated by the planar light source (1) and is provided between work (W) to be inspected and the planar light source (1); and a first aperture (31) provided between the planar light source (1) and the lens (2) or between the lens (2) and the work (W) to be inspected. The positions of the planar light source (1) and lens (2) relative to the work (W) to be inspected are set such that the imaging plane (IM) to which the light source (1) is focused is in the vicinity of the work (W) to be inspected. The position of the first aperture (31) relative to the lens is set such that the central axis of a solid angle for the radiation, which is prescribed by detection light incident to an outer edge part of the focal plane (IM), is parallel to the optical axis (LX) or is offset from the optical axis and inclined a prescribed amount. |
