发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 Disclosed is a semiconductor device in which an n-channel type first thin film transistor and a p-channel type second thin film transistor are provided on the same substrate. The first thin film transistor has a first semiconductor layer (11), and the second thin film transistor has a second semiconductor layer (20), a third semiconductor layer (21), and a fourth semiconductor layer (22). The first semiconductor layer (11), the second semiconductor layer (20), the third semiconductor layer (21) and the fourth semiconductor layer (22) are formed of the same film, and the first and second semiconductor layers (11, 20) respectively have slanted portions (11e, 20e) positioned at respective peripheries, and main portions (11m, 20m) made of portions other than the slanted portions. A p-type impurity is implanted into the slanted portion (11e) of the first semiconductor layer at a concentration higher than that in the main portion (11m) of the first semiconductor layer and that in the main portion (20m) of the second semiconductor layer.
申请公布号 US2013146879(A1) 申请公布日期 2013.06.13
申请号 US201113703987 申请日期 2011.06.13
申请人 YAMANAKA MASAKI;HOTTA KAZUSHIGE;SHARP KABUSHIKI KAISHA 发明人 YAMANAKA MASAKI;HOTTA KAZUSHIGE
分类号 H01L27/092;H01L29/786;H01L33/00 主分类号 H01L27/092
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