发明名称 PROCESSING DEVICE GROUP CONTROLLER, MANUFACTURING PROCESS SYSTEM, PROCESSING DEVICE GROUP CONTROL METHOD, MANUFACTURING OPTIMIZATION SYSTEM, MANUFACTURING OPTIMIZATION DEVICE, AND MANUFACTURING OPTIMIZATION METHOD
摘要 <p>A processing device group controller (1) comprises: a storage unit (12) which stores a start-up arrangement which includes information of a maintenance schedule for a plurality of processing devices which process a processing subject and with which equipment is respectively associated, and a conveyance plan which includes information of a timing at which the processing subject is conveyed into and conveyed out of the plurality of processing devices; a detector unit (102) which detects a step which compares the conveyance plan with the start-up arrangement of each processing device, a step which specifies a final pre-maintenance process for each processing device, and detects an end timing for the specified process; and an instruction unit (103) which executes, for each processing device, at the end timing, a step which instructs switching, together with the associated equipment, to an idle state.</p>
申请公布号 WO2013077191(A1) 申请公布日期 2013.05.30
申请号 WO2012JP78958 申请日期 2012.11.08
申请人 TOKYO ELECTRON LIMITED 发明人 MIZUTANI TAKU;NAMIOKA ICHIRO;IIJIMA TOSHIHIKO;TODATE SHIGENORI;ITO TAKAHIRO
分类号 G05B19/418;H01L21/02 主分类号 G05B19/418
代理机构 代理人
主权项
地址
您可能感兴趣的专利