| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method which improves the performance of a piezoelectric element, a liquid injection head, and a liquid injection apparatus, each having a piezoelectric layer containing at least Bi, Ba, Fe and Ti. <P>SOLUTION: A precursor solution 31 containing at least Bi, Ba, Fe and Ti, whose pH, when made into an aqueous solution, is 7 or more, is coated on a lower electrode 20, and then the coated precursor solution 31 is crystallized to form a piezoelectric ceramic containing a perovskite-type oxide. A method for manufacturing a piezoelectric element includes a step of forming an electrode on a piezoelectric ceramic 30. A method for manufacturing a liquid injection head includes a step of forming a piezoelectric element according to the method for manufacturing a piezoelectric element. <P>COPYRIGHT: (C)2013,JPO&INPIT |
