| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor element using an electrostatic actuator having electrodes in a comb-tooth form. <P>SOLUTION: The angular velocity sensor element is provided with a fixed electrode 110 in a comb-tooth form of protrusions and recessions and a movable electrode 120 in a comb-tooth form of protrusions and recessions for vibrating in the direction of the fixed electrode 110. The fixed electrode 110 and the movable electrode 120 are engaged with each other in such a way that protrusion parts 110a of one electrode may be inserted in recession parts 120b of the other electrode. The fixed electrode 110 and the movable electrode 120 are biased and opposed to each other in such a way that the sizes of two lateral gaps Y1 and Y2 between the protrusion parts 110a and the recession parts 120b with one inserted in the other may be different from each other. <P>COPYRIGHT: (C)2009,JPO&INPIT |
