| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensitive film forming jig capable of easily forming a sensitive film only on excitation electrodes of a quartz vibration element and a sensitive film forming method capable of increasing the detection accuracy of a QCM sensor element and increasing the productivity thereof. <P>SOLUTION: The sensitive film forming jig is used when forming a sensitive film on the excitation electrodes of a quartz vibration element mounted on a holder including a base portion, a leg portion and a fixed portion. The jig includes a first jig, a second jig, a first O-ring, a second O-ring and a third O-ring. The first O-ring is fixed by the first jig and the crystal piece therebetween, the second O-ring is fixed by the second jig and the crystal piece therebetween and the third O-ring is fixed by the first jig and the second jig. The jig is configured so that each of the excitation electrodes of the quartz vibration element is exposed through plural through holes formed on the first jig and the second jig. <P>COPYRIGHT: (C)2013,JPO&INPIT |
