| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask blank and a transfer mask for solving such a problem that a film stress of a thin film has a stronger tendency to become a compression stress with the elapse of time. <P>SOLUTION: In a mask blank in which a thin film is formed on a main surface of a glass substrate, the thin film is formed from a material which contains tantalum and is substantially free from hydrogen, and an invasion restraining film for restraining the invasion of the hydrogen into the thin film from the glass substrate is provided between the main surface of the glass substrate and the thin film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
