| 发明名称 |
Method and apparatus of growing a thin film |
| 摘要 |
A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.
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| 申请公布号 |
US8420186(B2) |
申请公布日期 |
2013.04.16 |
| 申请号 |
US20070987307 |
申请日期 |
2007.11.29 |
| 申请人 |
HUANG JAU-CHYN;CHENG KONG-WEI;CHANG WEN-SHENG;LEE TAI-CHOU;WU CHING-CHEN;INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
HUANG JAU-CHYN;CHENG KONG-WEI;CHANG WEN-SHENG;LEE TAI-CHOU;WU CHING-CHEN |
| 分类号 |
B06B1/20 |
主分类号 |
B06B1/20 |
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