| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide technology by which a solid electrolyte layer is formed without generating dendrite-like precipitates. <P>SOLUTION: In order to form a solid electrolyte layer 14 on a positive electrode 13 or a negative electrode 15, a mask 17 on which surface graphite or LiCoO<SB POS="POST">2</SB>is exposed is arranged on a substrate 11 and a patterned solid electrolyte layer 14 is formed by sputtering a target composed of LiPON. By exposing a material which absorbs Li on the surface of the mask 17, lithium ions which move in an electric field are fixed, and the solid electrolyte layer 14 can be formed upon sputtering without generating dendrite-like precipitates. The material is preferably graphite or LiCoO<SB POS="POST">2</SB>which does not show volume expansion even when absorbing lithium. <P>COPYRIGHT: (C)2013,JPO&INPIT |
