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发明名称
摘要
申请公布号
JP5172567(B2)
申请公布日期
2013.03.27
申请号
JP20080246845
申请日期
2008.09.25
申请人
发明人
分类号
H01L21/312;C07F7/18;C08G77/50;H01L21/316
主分类号
H01L21/312
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