摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily control a cone emitter distribution while simplifying manufacturing procedures by reducing control parameters in processes. Ž<P>SOLUTION: A method for forming a cone emitter on the top surface of a BN thin film performs the crystallization by irradiating the ultraviolet light onto the top surface of the amorphous BN thin film that is formed on the top surface of a substrate and has a flat top surface. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž</p> |