发明名称
摘要 <p>&lt;P&gt;PROBLEM TO BE SOLVED: To easily control a cone emitter distribution while simplifying manufacturing procedures by reducing control parameters in processes. Ž&lt;P&gt;SOLUTION: A method for forming a cone emitter on the top surface of a BN thin film performs the crystallization by irradiating the ultraviolet light onto the top surface of the amorphous BN thin film that is formed on the top surface of a substrate and has a flat top surface. Ž&lt;P&gt;COPYRIGHT: (C)2010,JPO&INPIT Ž</p>
申请公布号 JP5170653(B2) 申请公布日期 2013.03.27
申请号 JP20080081441 申请日期 2008.03.26
申请人 发明人
分类号 H01J9/02 主分类号 H01J9/02
代理机构 代理人
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