| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten the time required for detecting an alignment mark. <P>SOLUTION: In a detection method of an alignment mark, when detecting an alignment mark M1 of a current substrate 8, a moving device 41 is so controlled that the photographing region of a CCD camera 37 is initially positioned in a mark present region R of a previous substrate 8. When an alignment mark M1 cannot be detected in the mark present region R of the previous substrate 8, the moving device 41 is so controlled that the photographing regions of the CCD camera 37 are sequentially positioned in respective photographing regions, in the order of photographing according to a search table C in a detection range B, with the mark present region R used as a starting point. <P>COPYRIGHT: (C)2009,JPO&INPIT |
