| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a peeling device which suppresses damage in peeling. <P>SOLUTION: The peeling device 10 sequentially peels an interface 8 of a substrate 2 and a reinforcing plate 3 which reinforces the substrate 2 from one end side to other end side. The peeling device includes: a support means 20 which supports a first main surface 6b of a lamination 6 including the substrate 2 and the reinforcing plate 3; a flexible plate 30 which sucks a second main surface 6a of the lamination 6; a plurality of movable bodies 40 which are fixed on the flexible plate 30 at intervals and can move independently with respect to the support means 20; and a control device 80 which controls movement of the plurality of movable bodies 40. The movable body 40, which separates from the support means 20 first in peeling, out of the plurality of movable bodies 40 is arranged behind a peeling starting end 8b of the interface 8 when viewed from a vertical direction with respect to the interface 8 before the start of peeling. <P>COPYRIGHT: (C)2013,JPO&INPIT |
