发明名称 Systems and methods for co-doping wide band gap materials
摘要 Various embodiments of the present disclosure provide a method of simultaneously co-doping a wide band gap material with p-type and n-type impurities to create a p-n junction within the resulting wide band gap composite material. The method includes disposing a sample comprising a dopant including both p-type and n-type impurities between a pair of wide band gap material films and disposing the sample between a pair of opposing electrodes; and subjecting the sample to a preselected vacuum; and heating the sample to a preselected temperature; and applying a preselected voltage across the sample; and subjecting the sample to at least one laser beam having a preselected intensity and a preselected wavelength, such that the p-type and n-type impurities of the dopant substantially simultaneously diffuse into the wide band gap material films resulting in a wide band gap compound material comprising a p-n junction.
申请公布号 US8394711(B2) 申请公布日期 2013.03.12
申请号 US201113154000 申请日期 2011.06.06
申请人 PRELAS MARK A.;GHOS TUSHAR K.;TOMPSON, JR. ROBERT V.;VISWANATH DABIR S.;LOYALKA SUDARSHAN;THE CURATORS OF THE UNIVERSITY OF MISSOURI 发明人 PRELAS MARK A.;GHOS TUSHAR K.;TOMPSON, JR. ROBERT V.;VISWANATH DABIR S.;LOYALKA SUDARSHAN
分类号 H01L21/22 主分类号 H01L21/22
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