| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for calibrating a measurement error caused by change of situation of a sensor, particularly a method for easy calibration of a cold-cathode type ionization vacuum gauge at a production field. <P>SOLUTION: Displays of a measuring instrument 12 with correct display and a measuring instrument 1 with error are displayed in an E2 PROM data reference system, and calibration is performed in a state where both sensors are in the same atmosphere. Also, calibration of a cold-cathode type ionization vacuum gauge 1 is performed in a spot system. <P>COPYRIGHT: (C)2013,JPO&INPIT |
