ROTATING-ELEMENT ELLIPSOMETER AND METHOD FOR MEASURING PROPERTIES OF THE SAMPLE USING THE SAME

摘要

PURPOSE: An optical diode-rotary type ellipsometer and a method for measuring properties of a specimen using the same are provided to measure a Fourier coefficient with respect to the intensity of a waveform more easily by controlling the number of the measurement of integral time and exposure according to the intensity of lights. CONSTITUTION: An ellipsometer comprises a light source(110), a polarization modulating unit, a specimen holder(210), a polarization analyzing unit, and a digital signal modulating device. The digital signal modulating device is connected to an optical diode unit of the polarization modulating unit or polarization analyzing unit, thereby controlling the number of the exposure measurement of an optical detector.