发明名称 |
COLLECTOR MIRROR ASSEMBLY AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION |
摘要 |
<p>A collector mirror assembly includes a collector mirror that includes a reflective surface and a hole having an edge. The hole extends through the reflective surface. The assembly also includes a tubular body having an inner surface and an outer surface. The tubular body is constructed and arranged to guide a gas flow in a direction substantially transverse to the reflective surface. The outer surface of the tubular body and the edge of the hole form an opening arranged to guide a further gas flow that diverges with respect the gas flow substantially transverse to the reflective surface.</p> |
申请公布号 |
EP2561407(A1) |
申请公布日期 |
2013.02.27 |
申请号 |
EP20110709923 |
申请日期 |
2011.03.18 |
申请人 |
ASML NETHERLANDS BV |
发明人 |
LABETSKI, DZMITRY;LOOPSTRA, ERIK;KEMPEN, ANTONIUS |
分类号 |
G02B5/08;G03F7/20;G21K5/04 |
主分类号 |
G02B5/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|