MANUFACTURING METHOD OF GROUP III NITRIDE CRYSTAL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a group III nitride crystal substrate capable of manufacturing a group III nitride crystal substrate that is large with small warpage and surface roughness, with high efficiency and high yield, by using a resin fixed abrasive-grain wire.

SOLUTION: A manufacturing method of a group III nitride crystal substrate includes a step S1 of preparing a group III nitride crystal and a step S2 of manufacturing a group III nitride crystal substrate by slicing the group III nitride crystal by using a resin fixed abrasive-grain wire.

COPYRIGHT: (C)2013,JPO&INPIT