| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily measure a height of an object to be measured even if the object to be measured is disposed under transparent media having various refraction factors and various thickness. <P>SOLUTION: A height measuring device 1 comprises an objective lens 24 which guides a first illumination beam split from an illumination beam to an object 6 to be measured, an objective lens 26 which guides a second illumination beam split from the illumination beam to a reference mirror 28, a movable part 36 which adjusts an optical path length of the second illumination beam, a high-speed camera 12 which captures an interference image of two illumination beams reflected by the object 6 to be measured and the reference mirror 28, and a piezo driver 18 which relatively moves the objective lens 24 and the object 6 to be measured in an optical axis direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
