| 摘要 |
In this structure of displacement monitoring electrode, in order to maintain a constant target amplitude of a detection mass even if the relative relationship between a fixed electrode and a movable electrode changes, the fixed electrode secured to a substrate and the movable electrode capable of being displaced in a predetermined axial direction, each of which has a comb-like shape and is constituted by a base and electrode fingers extending from the base in the predetermined axial direction parallel to the substrate, are arranged to be opposed to each other so that the electrode fingers of the respective electrodes are engaged with each other, and the displacement of the detection mass to be driven at the target amplitude is monitored on the basis of the amount of change in the capacitance between the fixed electrode and the movable electrode. The change sensitivity for the change amount of the capacitance relative to the displacement of the movable electrode in the predetermined axial direction is larger after the displacement of the movable electrode in the predetermined axial direction reaches an target displacement corresponding to the target amplitude of the detection mass, compared to the change sensitivity before the displacement of the movable electrode reaches the target displacement. |
