| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic apparatus having high reliability. <P>SOLUTION: The electronic apparatus 100 includes: a substrate 10; a functional element 20 formed above the substrate 10; a surrounding wall 40 defining a cavity 1 in which the functional element 20 is disposed; and wiring layers 30, 32 formed above the substrate 10 and connected to the functional element 20. The wiring layers 30, 32 pass between the substrate 10 and the surrounding wall 40 and extend outside the surrounding wall 40. The surrounding wall 40 includes: a silicon nitride layer 42; and a conductive layer constituted of at least one of a metallic layer and a silicon layer. The silicon nitride layer 42 is disposed between wiring layers 30, 32 and the conductive layer 44. <P>COPYRIGHT: (C)2013,JPO&INPIT |
