发明名称 |
CLAM SHELL TWO-PIN WAFER HOLDER FOR METAL PLATING |
摘要 |
A clam shell wafer holder includes a base and a lid pivotally connected with the base by an integral hinge. The base includes a rotatable wafer support, and the lid includes a universal frame and a pin holder attachment spaced inwardly from the frame. Only two contact pins are formed in a wafer-facing surface of the pin holder attachment. The contact pins are manually aligned with and contact two points on a wafer when the lid is closed against the base. A method for holding a wafer for plating is provided using the disclosed holder apparatus.
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申请公布号 |
US2013037413(A1) |
申请公布日期 |
2013.02.14 |
申请号 |
US201213653181 |
申请日期 |
2012.10.16 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED;TEXAS INSTRUMENTS INCORPORATED |
发明人 |
LAW KENNITH RAY;BISKEBORN RODNEY ALLEN |
分类号 |
C25D5/04 |
主分类号 |
C25D5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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