| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a piezoelectric film which has few oxygen defects and excels in piezoelectric characteristics. <P>SOLUTION: A piezoelectric film consists of an alkali niobium oxide of a perovskite structure expressed by a general formula (Na<SB POS="POST">x</SB>K<SB POS="POST">y</SB>Li<SB POS="POST">z</SB>)NbO<SB POS="POST">3</SB>(where, 0≤x≤1, 0≤y≤1, 0≤z≤0.2, x+y+z=1). In the piezoelectric film, the alkali niobium oxide has a pseudo-cubic, tetragonal, orthorhombic, monoclinic or rhombohedral crystal or a coexisting crystal structure thereof, and when the sum of a K-O bond and a K-Metal bond in the bonding state around K atoms of the alkali niobium oxide is assumed to be 100%, the ratio of the K-O bond is 46.5% or more and the ratio of the K-Metal bond is 53.5% or less. <P>COPYRIGHT: (C)2013,JPO&INPIT |
