| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform sample observation under a predetermined atmosphere gas pressure condition. <P>SOLUTION: There is provided a sample observation method for an electron microscope comprising: a gas atmosphere chamber 21 which has an electron beam passage hole on the electronic optical axis and is supplied with gas from a gas supply system; and a sample holder 18 for holding a sample on its tip and introducing the sample into the atmosphere chamber 21 from a non-vacuum section. The method comprises the steps of: introducing a pressure measurement holder 30 having a pressure measurement element 31 attached thereon before introducing the sample holder 18 into the gas atmosphere chamber 21; adjusting the pressure in the gas atmosphere chamber 21 by the gas supply system such that the pressure, detected by the pressure measurement element 31, in the gas atmosphere chamber 21 results in a predetermined pressure; introducing the sample holder 18 then into the gas atmosphere chamber 21 to replace the pressure measurement holder 30 with it; irradiating the sample S with an electron beam from electron beam generating means; and observing the sample image based on the electron beam having passed through the sample S. <P>COPYRIGHT: (C)2013,JPO&INPIT |
