发明名称 FIELD EFFECT TRANSISTOR USING GRAPHEME OXIDE THIN FILM AND THE MANUFACTURING METHOD THEREOF
摘要 <p>PURPOSE: A field effect transistor using a grapheme oxide thin film and a manufacturing method thereof are provided to reduce manufacturing costs by manufacturing a logic circuit using a printing method. CONSTITUTION: A graphene oxide layer(150) treated by a reduction process is formed on a substrate. A source electrode(130) and a drain electrode(140) are formed on the graphene oxide layer. A dielectric layer(120) is formed on the source electrode and the drain electrode. A gate electrode(110) is formed on the dielectric layer. The graphene oxide layer is used as a channel layer. [Reference numerals] (100) Substrate; (110) Gate electrode; (120) Dielectric layer; (130) Source electrode; (140) Drain electrode; (150) Graphene oxide layer</p>
申请公布号 KR20130011966(A) 申请公布日期 2013.01.30
申请号 KR20120079152 申请日期 2012.07.20
申请人 DONGGUK UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION 发明人 LEE, SANG WUK;KANG, TAE WON;GENNADY PANIN
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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