发明名称 |
FIELD EFFECT TRANSISTOR USING GRAPHEME OXIDE THIN FILM AND THE MANUFACTURING METHOD THEREOF |
摘要 |
<p>PURPOSE: A field effect transistor using a grapheme oxide thin film and a manufacturing method thereof are provided to reduce manufacturing costs by manufacturing a logic circuit using a printing method. CONSTITUTION: A graphene oxide layer(150) treated by a reduction process is formed on a substrate. A source electrode(130) and a drain electrode(140) are formed on the graphene oxide layer. A dielectric layer(120) is formed on the source electrode and the drain electrode. A gate electrode(110) is formed on the dielectric layer. The graphene oxide layer is used as a channel layer. [Reference numerals] (100) Substrate; (110) Gate electrode; (120) Dielectric layer; (130) Source electrode; (140) Drain electrode; (150) Graphene oxide layer</p> |
申请公布号 |
KR20130011966(A) |
申请公布日期 |
2013.01.30 |
申请号 |
KR20120079152 |
申请日期 |
2012.07.20 |
申请人 |
DONGGUK UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION |
发明人 |
LEE, SANG WUK;KANG, TAE WON;GENNADY PANIN |
分类号 |
H01L21/336;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|