Vakuum-Meßgerät für die integrale Dichtigkeitskontrolle mit leichten Gasen

摘要

In a vacuum meter for integral tightness checking using light gasses, such as helium, as test gas and having a sample enclosed in a test container, either the test container contains the test gas and the sample is connected to a vacuum pump by a gas-tight line that starts at the test container and within which is arranged a test gas detector, or alternatively the sample contains the test gas and the test container is linked to a vacuum pump by a gas-tight line within which is arranged a test gas detector. In both alternative embodiments of the vacuum meter, a significant increase in the reaction accuracy is achieved in different test conditions by arranging in the line (41) a first valve (20) designed as a shutt-off member and a first vacuum pump (30) at the end of the line, and by arranging between the test container (40) and the valve (20) a branch line (42, 43) with a second valve (21) designed as a shutt-off member, a test gas detector (50) at the end of the branch line and therebetween a turbomolecular pump (31) whose high-vacuum side (31b) is oriented towards the detector (50).