| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter substrate having a touch panel electrode of an in-cell system with mass productivity capable of maintaining a stable quality free from defects such as residue occurrence or unevenness in multi imposition manufacture in sheet-fed system, and a color filter substrate having a touch panel electrode free from unevenness, obtained by the method. <P>SOLUTION: A method is for manufacturing a color filter substrate having a touch panel electrode of an in-cell system comprising a plurality of screens imposed on one transparent substrate. The method includes at least: a touch panel electrode layer formation process; an intermediate layer solid formation process; an inorganic film layer solid formation process; a color filter layer formation process; a dry etching resistance film formation process; a dry etching process; and a dry etching resistance film peeling process, in this order. <P>COPYRIGHT: (C)2013,JPO&INPIT |
